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Title : Axcelis Ships its First 12MeV Implanter to CIS Customer for Evaluation
link : Axcelis Ships its First 12MeV Implanter to CIS Customer for Evaluation

Axcelis Ships its First 12MeV Implanter to CIS Customer for Evaluation

Axcelis reports that it has shipped first Purion XEmax evaluation system to a large image sensor customer. In a previous version of this announcement, Axcelis claimed it supports up to 15MeV energies, but now it just says "more than 12MeV."

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